JPH0226783B2 - - Google Patents

Info

Publication number
JPH0226783B2
JPH0226783B2 JP58065820A JP6582083A JPH0226783B2 JP H0226783 B2 JPH0226783 B2 JP H0226783B2 JP 58065820 A JP58065820 A JP 58065820A JP 6582083 A JP6582083 A JP 6582083A JP H0226783 B2 JPH0226783 B2 JP H0226783B2
Authority
JP
Japan
Prior art keywords
insulating film
film
psg
etching
polysilicon
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP58065820A
Other languages
English (en)
Japanese (ja)
Other versions
JPS59191354A (ja
Inventor
Yasushi Okuyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP6582083A priority Critical patent/JPS59191354A/ja
Publication of JPS59191354A publication Critical patent/JPS59191354A/ja
Publication of JPH0226783B2 publication Critical patent/JPH0226783B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP6582083A 1983-04-14 1983-04-14 半導体装置の製造方法 Granted JPS59191354A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6582083A JPS59191354A (ja) 1983-04-14 1983-04-14 半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6582083A JPS59191354A (ja) 1983-04-14 1983-04-14 半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JPS59191354A JPS59191354A (ja) 1984-10-30
JPH0226783B2 true JPH0226783B2 (en]) 1990-06-12

Family

ID=13298043

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6582083A Granted JPS59191354A (ja) 1983-04-14 1983-04-14 半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JPS59191354A (en])

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60239042A (ja) * 1984-05-11 1985-11-27 Sony Corp 半導体装置の製造方法
JPH0669038B2 (ja) * 1984-12-19 1994-08-31 セイコーエプソン株式会社 半導体装置の製造方法
JPS61196555A (ja) * 1985-02-26 1986-08-30 Nec Corp 多層配線の形成方法
JPS6324625A (ja) * 1986-07-16 1988-02-02 Mitsubishi Electric Corp 半導体装置およびその製造方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5773940A (en) * 1980-10-28 1982-05-08 Toshiba Corp Levelling method of insulation layer

Also Published As

Publication number Publication date
JPS59191354A (ja) 1984-10-30

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